| Code# | 525-020EP |
|---|---|
| Granite Stage | (390*220)mm |
| Glass Stage | (229.5*129.5)mm |
| X/Y Axis Travel | (200*100)mm |
| Linear Scales | Resolution: 0.5um |
| Code# | 502-120G |
|---|---|
| Reizen op de X/Y-as | (300*200) mm |
| Afmeting (WxDxH) | (1237*740*1664) mm |
| Gewicht | 380 kg |
| Z-as Reizen | 200 mm |
| Code# | 529-120G |
|---|---|
| Reizen op de X/Y-as | (300*200) mm |
| Z-as Reizen | 200 mm |
| X/Y/Z 3-assige lineaire schaal ((mm) | Resolutie: 0,5 mm |
| XY-as nauwkeurigheid | ≤ 2,5+L/200 ((um) |