| Code# | 525-020DP |
|---|---|
| Granieten stadium | (310*220) mm |
| Glazen podium | (179.5*129.5) mm |
| X/Y -as Travel | (150*100) mm |
| Lineaire schalen | Resolutie: 0,5um |
| Code# | 525-020P |
|---|---|
| Granieten stadium | (310*220) mm |
| Glazen podium | (179.5*129.5) mm |
| X/Y -as Travel | (150*100) mm |
| X/Y lineaire schalen | Resolutie: 0,5um |
| Code# | 512 tot en met 350 |
|---|---|
| Grootte van de werkfase | 355 x 126 mm |
| Werkfase reizen | 200x100mm |
| Focus | 90 mm |
| Nauwkeurigheid | ≤3+L/200 (um) |
| Code# | 542-310 |
|---|---|
| Werkfase reizen | 355x125 mm |
| X/y-as reizen | 200x120 mm |
| Z -as | 110 mm |
| Meetnauwkeurigheid | ≤3+l/200um |
| Code# | 542-310 |
|---|---|
| Werkfase reizen | 355x125 mm |
| X/y-as reizen | 200x120 mm |
| Z -as | 110 mm |
| Meetnauwkeurigheid | ≤3+l/200um |